Photolithography, a vital stage in the manufacture ... Whether DUV lithography remains the main technology for the next one or two nodes (feature sizes prescribed by Moore's law) or EUV takes ...

Technology ministry claims 'significant technological breakthroughs' in deep-ultraviolet lithography ... government is ...

Intel has been in the news lately thanks to its decision to buy the world's first high numerical aperture (High-NA) lithography machine from ASML in the Netherlands. So far, Intel is the only ...