One of the most complex parts of this process is lithography: the step in which shapes are drawn onto a silicon wafer. There are several ways to do this, all of them rather complicated ...

Interestingly, DUV lithography at a wavelength of 193 nm ... Using polarized illumination it is capable of printing down to a 36.5-nm half-pitch at full scan speed under laboratory conditions.

Derived from the Greek words 'lithos' meaning 'stone' and 'graphein' meaning 'to write', lithography was initially a method of printing images onto paper using stone templates. Specifically, ...

Extreme ultraviolet (EUV) lithography is the next step in this trend. It uses radiation of wavelength 13.5 nm, thereby offering significant potential to extend the resolution of photolithography ...

Lithography, once the exclusive domain of artists and printmakers, also lies at the heart of integrated circuit (IC) production. The process of shining light on a substrate through a photomask to ...

The integration of soft lithography with additive manufacturing techniques, such as 3D printing, will enable the fabrication of complex, hierarchical structures with multi-scale features.

A research partnership led by Lawrence Livermore National Laboratory (LLNL) has been formed to investigate the next evolution of extreme ultraviolet (EUV) lithography. The team will participate in the ...

TOKYO--(BUSINESS WIRE)--Dai Nippon Printing Co., Ltd ... generation 1 that support Extreme Ultra-Violet (EUV) lithography, a cutting-edge process in semiconductor manufacturing.